Artificial Neural Network Modeling of Interdigital Capacitor Sensor for Oxygen Detection

Microwave interdigital capacitors (IDCs) realized in standard microstrip technology whose electrodes are covered by a titanium-dioxide (TiO
₂
) layer can be used for sensing oxygen, as their RF behaviour change when exposed to different oxygen concentrations. In order to model the variation of the frequency dependent behaviour of an IDC with oxygen concentration, in this paper, artificial neural networks (ANNs) are exploited. The modelling results match very well the corresponding measured values over the whole range of oxygen concentration from 0 to 100%.