Effect of dielectric layer in ZnO/dielectric/Si layered structure on GSAW and HVPSAW propagation properties

The propagation characteristics of the GSAW and HVPSAW modes in ZnO/dielectric/Si layered structures were examined theoretically and experimentally. The dielectric layer effects on SAW propagation properties were examined by using SiO/sub 2/, Si/sub 3/N/sub 4/, and TiO/sub 2/ thin film layer. In case of ZnO/SiO/sub 2//Si structure, both GSAW and HVPSAW modes were observed experimentally. The HVPSAW mode velocity at kH/sub ZnO/=1.1 and kH(SiO/sub 2/)=0.02 was found at the value of 9,180 m/s. On the contrary, in ZnO/Si/sub 3/N/sub 4//Si and ZnO/TiO/sub 2//Si structures only GSAW modes were found.