Fabrication of high frequency SAW filters from 5 to 10 GHz using SiO/sub 2//ZnO/diamond structure

Two kinds of narrow band SAW filters were fabricated with the SiO/sub 2//ZnO/diamond structure. The center frequency of 5 GHz with the minimum insertion loss of 13 dB and the Q value of 650 was obtained with the electrodes of 0.5 /spl mu/m width. The center frequency of 10 GHz with the minimum insertion loss of 22 dB and the Q value of 730 was obtained with the electrodes of 0.65 /spl mu/m width using the harmonic wave. Both of these filters showed smaller frequency shift on temperature than that of ST-cut quartz.