Dynamic and static behavior of piezoelectric bimorphs with extenders in optical scanners

We have investigated the fabrication method by MEMS techniques of a Double Monomorph Optical Scanner and with Double "J" Flexures. The monomorphs were piezoelectric benders made of silicon covered by PZT, which acted as the piezoelectric material used to bend the flexures. A one dimensional double monomorph optical scanner consisting of two piezoelectric monomorphs connected to a mirror by means of Double "J" Flexures, has a large product of angular rotation and resonance frequency, and therefore it is more powerful and more versatile than a current state-of the-art optical scanner. We investigated resonance frequency and static behavior. The resonance showed nonlinear characteristics, evident in the shifting of the resonance frequency as function of the driving voltages and curve skipping.