Electron Heating Dynamics in Capacitively Coupled Plasmas Radio-Frequency Discharges at Low Pressures

Based on a one dimensional fluid model, a geometrically symmetric capacitive radio frequency discharge in argon at low pressure is presented. In the simulations, we evaluate the electron heating mechanisms in order to quantify their role in ionization. The electric field is strong enouth to prevent electrons from leaving the plasma in a short time. In the bulk plasma regions, the electron density is equal to ion density, and maintain the quasi-neutrality. The variation of the electron heating, ionization rate are studied. It is found that ionization rate and the electron heating are not in the same location, but the electron Ohmic heating and electron pressure heating are in the same spatial location.