Scatterometer and Intensity Distribution Meter With Screen Image Synthesis

A screen image synthesis (SIS) system is superior than the conventional methods in terms of high-speed measurement and low screen-cross-talk noise when used as a whole-field light-distribution meter. However, reflection signals cannot be measured using the conventional SIS system when it is used as a scattering meter. Furthermore, the conventional SIS system cannot be used to measure a large sample when it is used as an intensity distribution meter. In this study, we devised a rail-based SIS system as long as an image reconstruction algorithm. This would allow whole-field scattering light and intensity distribution measurements for various sample sizes. For this purpose, a versatile instrument was assembled by combining a whole-field intensity distribution meter and a whole-field scattering meter. The results of the experiments confirmed that the measuring time was drastically improved when the proposed instrument was used as a whole-field intensity distribution meter and a whole-field scattering meter. The high normalized cross correlation values of both measurements demonstrated the accuracy and feasibility of the proposed algorithm.