Design and Analysis of MEMS Racetrack Resonators for Force Sensing Applications

We describe, a integrated optical MEMS racetrack resonator based force sensor. This sensor works on the change in the refractive index of the optical sensing element. The resonant wavelength of the sensing element is changed under the applied force of the sensor, which can be read out at the drop-port of the IO racetrack resonator. This force sensor provides a wavelength shift obtained is 120 pm per 1μN, Q-factor of 8153.