Transmission electron microscopy investigation of texture development in magnesium oxide buffer layers

Biaxially textured magnesium oxide (MgO) buffer layers were grown by inclined substrate deposition and examined before YBa/sub 2/Cu/sub 3/O/sub 7-x/ deposition to optimize their texture. Transmission electron microscopy of buffer layers in both cross-sectional and plan view was used to investigate film microstructure and texture development as a function of deposition thickness (0.05-3 /spl mu/m) and substrate inclination angle (0-55/spl deg/ from the substrate normal). It was determined that the combined effects of preferential growth of the {200} equilibrium crystal habit of MgO and shadowing by columnar grains led to the development of off-axis [200]-textured films.