Design and Fabrication of the Vacuum Ultraviolet Nonlinear Metasurfaces

Nonlinear metasurface devices for generation and manipulation of coherent vacuum ultraviolet (VUV) light will be reported in this talk. The approaches for design, fabrication, and measurement of the metasurface devices with different working principles will be discussed. Our ultracompact metasurfaces are capable of efficiently generating VUV light via various nonlinear processes with effective nonlinear coefficients much better than general nonlinear medias in the targeted regime. They pave the way toward highly efficient and versatile miniaturized VUV nanodevices.