Scanning Microwave Impedance Microscopy: Room-Temperature and Low-Temperature Applications for Device and Material Characterization

For more than 50 years, Moore's law has creatively captured how the capability of electronics has expanded by creating ever smaller devices and exploiting new materials and devices. Critical to maintaining that trajectory of increased capability of electronics has been the creation of new and ever-more sensitive measurement techniques to guide invention and fabrication. Quantum effects, which are already important in roomtemperature semiconductor devices small in size, are key to the creation of this future technology. Further, many quantum effects arise at very low temperatures or with 1D and 2D materials and devices. This is motivating new metrology techniques at very low temperature, which assist in exploring these new phenomenom understanding and commercialization.