Micromechanical Reflect-Array for THz Radar Beam Steering based on a Mechanical D/A Converter and a Mechanical Amplifier

We present the concept, modelling, simulation and fabrication of a MEMS-based reflect-array and its components intended for THz radar beam steering. First, we present the dimensions for a MEMS-based reflection grating for THz beam steering. Based on these results, we introduce the working principle and system design of an in-plane single reflector system consisting of a digital-to-analogue converter (DAC) connected to a mechanical amplifier (mechAMP). A designed 3-bit system is able to perform discrete displacements of single reflectors and consists of multiple high-throw electrostatic actuators. The simulation results show a linear bi-directional throw of 100 μm. The fabrication process and the system testing are adopted to the dimensions required for THz applications.