Thermomechanical Reliability Enhancement of High-power MEMS with Movable Structure Based on Implanted Skin Hairs

It limits the development of the movable MEMS that the movable structure of MEMS has relative lower strength and the higher heat flux and thermal stress accompanied with high power density. According to this objective, the nano/micro scale skin hairs are proposed and selectivity implanted on the surfaces of the moveable MEMS to transfer the heat from the hot spot region effectively. The selected implanted density of the high thermal conductivity nanomaterial is based on the finite element analysis and the nanomaterial composite preparing. The nano/micro scale skin hairs is selectivity implanted on the side wall, the top surface or the bottom surface to reduce the additional effects on the MEMS performance including optical performance, electrical performance and so well. And, the footprint size of the MEMS is not pumped up. Furthermore, the fabricating process is reliable and compatible with original micromachining processes. The most important one is that the self-heat-transfer capacity of MEMS can be improved more greatly, which can reduce thermal stress and strengthen the reliability of the MEMS performance dramatically.