The MECOR (mechanically corrugated) silicon solar cell concept

The novel MECOR solar cell concept relies on double sided mechanically V-textured surface with V-groove running parallel on both sides. The cell thickness can be freely chosen by adjusting the cutting depth. After shallow emitter diffusion and thermal oxidation the oxide is opened either by standard photolithography adapted to the V-textured surface or by shallow angle photolithography. The selection depends on the chosen cell structure. The local back surface field is formed by evaporating aluminum through a silicon mask with point like openings. Different kinds of MECOR cells have been processed varying the angle of the V-grooves on front and rear side. Efficiencies of up to 16.4% (4 cm/sup 2/, mono-Si) have been demonstrated. Two-dimensional device simulations investigating the influence of surface recombination and diffusion length on the cell parameters have been carried out.