Sensor Design Made by Bosch: Invited Paper

In this paper the sensor design made by Bosch, one of the world's largest supplier of micromechanical sensors in automotive and consumer applications, is briefly introduced. The design is one of the key elements to bridge the different domains between process technology, electronics, system and customers needs. The here presented flow and methodology ensures an integration of all perspectives from prototyping to series production. Examples of typical Sensor/MEMS design including various mechanical and electronical constraints are given.