Characterizations of Electrolyte–Insulator–Semiconductor Sensors With Array Wells and a Stack-Sensing Membrane

This study addressed the characteristics of electrolyte-insulator-semiconductor (EIS) pH sensors with array wells and sensing membrane stacks of 3-aminopropyltriethoxysilane (APTES)/SiO
₂
. The arrays of square wells were fabricated by nanoimprint lithography (NIL) and investigated using an atomic force microscope (AFM). The surface chemical properties of molecular APTES on SiO
₂
were investigated by water contact angle (WCA) studies and X-ray photoelectron spectroscopy (XPS). The sensitivity, hysteresis, and drift of EIS sensors were studied. All of the sensing properties were greatly enhanced by using the techniques we propose. With these improvements, high-performance sensors can be fabricated for future biochemical applications.