Dielectric Transfer Process for 3D Printed Metal Microsystems

This paper deals with the fabrication and unconstrained dielectric transfer of 3D printed metal components demonstrated using an electrostatic micro switch. The use of micro laser sintering (MLS) to print micro-electro-mechanical systems (MEMS) enables a new MEMS fabrication capability able to bypass conventional high-cost fabrication processes for low-volume prototypes. To demonstrate the above mentioned technology, this paper presents the fabrication of a one-piece 3D printed metal component consisting of electrodes and sacrificial metal frames from bronze powder. A method to transfer this component onto the target substrate, removal of sacrificial metal frame for electrical isolation, electrostatic device actuation, and characterization of the dielectric isolation are presented in detail.