A smart position sensor for 3-D measurement

A smart position sensor for 3-D measurement has been developed. The sensor is designed for detecting positions of laser spots projected on target objects quickly. The sensor has a 256/spl times/256 pixel array, a set of address decoders for variable block access and a variable block logical-OR circuit on an 8.9 mm/spl times/8.9 mm die. The sensor is designed and fabricated in 0.6 /spl mu/m CMOS 3-metal 2-poly-Si process. The measured accuracy of 3-D measurement is 0.4%. The speed of 3-D measurement is up to 10000 points/s.