Preparation of Fresnel zone plate for LED application using laser lithography

In this paper a fabrication of Fresnel zone plate on glass and polydimethysiloxane (PDMS) substrate is presented. The pattern of Fresnel zone plate was prepared in the aluminium layer using combination of direct laser writing process and other patterning methods - lift off and wet etching method. Principal procedures are described and experimental results are presented. Finally, optical properties of the prepared Fresnel zone plates are investigated.