Thermoelastic Damping in the Flexural Vibration of Bilayered Microbeam Resonators with Annular Cross-Section

The accurate estimation of thermoelastic damping (TED) is essential and significant for the design and fabrication of many multilayer composite microbeam resonators. In the past works, only the frameworks for microbeams with rectangular or circular cross-section have been developed. This paper aims to develop the analytical models for TED in the flexural vibration of bilayered microbeam resonators with annular cross-section. The results of TED obtained by the analytical models agree well with those simulated by the finite element method (FEM) model. Additionally, the behavior of TED in different thicknesses of bilayered microbeams is explored.