New Algorithm Design of Micro-vibration isolation Platform’s Robust Controller

Because of the piezoelectric micro-vibration isolation platform’s and the actuators’ perturbation, the 6-DOF micro-vibration isolation platform does not be considered as linear system, and which needs robust controllers control the piezoelectric micro-vibration isolation platform. Through the method of state feedback, based on Riccati inequality, designed a new algorithm of robust controller which contends compromise factors’ affection to isolate the low frequency distribution, and those factors’ affection are replaced by all kinds of platform model’s parameters distribution. The simulation and experiment results show that the Algorithm is better than the simple robust controller.