Design of MEMS based Capacitive Pressure Sensor to Monitor the Respiratory Conditions of Patients

Healthcare plays a major role in enhancing a person”s quality of life. Continuous monitoring of healthcare is required especially in hospitals to keep an eye on one's health condition. Monitoring of a patient in hospitals and ambulances is a vital task which involves lot of human intervention and cannot be reliable all the time. Hence” a need is felt to mechanize various monitoring activities. In this paper” we propose to institute a mechanism to monitor the various respiratory conditions of a given patient. This mechanism includes designing of a MEMS based capacitive pressure sensor which would help to monitor and diagnose various respiratory diseases based on the pressure of a person”s exhaled breath. In this design” respiratory conditions are analyzed based upon the displacement of the cantilever and capacitance variation in the structural design.