Individual Deadbeat Control for Three-Phase Interleaved Buck DC/DC Converters

In recent years, pulse operation function has been increasingly used in both the film formation and semiconductor manufacturing processes. As one of the pulse operations, high/low pulse operation has also attracted considerable attention. To perform a high/low pulse operation by using the dc/dc converter, we require fast control responses of the dc/dc converter. Therefore, we applied the three-phase interleave of the circuit and deadbeat control. In our previous study, we derived the control equation of the deadbeat control by considering the delay time. We determined the manipulated value of the reference phase by the control equation; however, the other phases were decided by shifting the manipulated value of the reference phase. In this study, we determine the manipulated value of each phase, showing transition time of 7.0 μs for the high/low pulse operation of 280/70 V.