The Study on Manufacturing Process of Printable Temperature Distribution Measuring Sensor Using the Thermocouple Metal Paste

Currently, as the development of highly functional products in the electronics industry is accelerated, there is a growing need for the development of new method to measure internal temperature, not surface, in the field of semiconductor packaging technology. In this study, we developed a manufacturing process for Printable Temperature Distribution Measuring Sensor(PTDMS) by screen printing method. For measuring temperature, the circuits of the sensor were formed using Cu and Constantan paste, which can constitute the multi-nodes T-type thermocouple. We researched the suitable curing and sintering conditions for the thermocouple materials to form appropriate circuits for the sensor. As a result of the test, the manufactured PTDMS has an error rate of less than ± 3 %, and derived a result that can normally measure temperature.