Intelligent 3-D micro-structuring with UV-laser systems

Summary form only given. Flexible manufacturing techniques are necessary for the three-dimensional micro-structuring of prototypes, small batch sizes and tools for, e.g. microembossing and molding. This paper shows the enormous potential of UV-lasers for the flexible and economical production of microcomponents for a huge variety of materials. In addition, specially-developed machine technology is presented.