Ultra-Low Loss and Fabrication Tolerant Silicon Nitride (Si3N4) (de-)Muxes for CWDM Optical Interconnects

Low-loss, fabrication-tolerant Si3N4 CWDM lattice filters and AWGs are demonstrated for 990 – 1065nm bottom-emitting VCSELs. Channel separation of 25 nm, XT < −35 dB and −20 dB are reported with temperature shift of 14.5 pm/°C.