Mems Ion Sources For Spectroscopic Identification Of Gaseous And Liquid Samples

This work describes the construction, working principle and properties of two types of ion sources made in MEMS technology, designed for spectroscopic identification of gaseous and liquid samples. The first one is formed as an electro-magnetic trap efficiently ionizing gas particles even in a high vacuum. The second one uses the principle of electro-spray ionization. The application of the same materials and consistent technology allows for their integration on a single silicon-glass chip.