Design & Simulation of MEMS Based Shockwave Pressure Sensor for Test & Evaluation Applications

During dynamic testing & evaluation of different armaments stores, recording of different parameters related to internal, external and terminal ballistics precisely plays a crucial role for the qualitative assessment of the different ammunitions and ordnances. This paper deals with design and simulation of MEMS based pressure sensor which will be used to measure shockwave pressure. Shockwave pressure is used to compute the velocity of the projectile. Three different configurations such as I. Single turn piezoresistor, II. Four turn meander shaped piezoresistor and III. Bossed diaphragm structure have been presented here to design the pressure sensor. The simulation has been performed using FEM based CoventorWare tool. The measurement range of the pressure sensor is up to 10 psi.