Convection-based micromachined inclinometer using SOI technology

This paper presents a novel inclinometer operating with the free-convection heat transfer principle which has been developed at the HSG-IMIT for the VOGT electronic company. The use of SOI-technology permits a short technological process for the sensor fabrication and a very good mechanical stability like a high reproducibility. Using free convection properties the sensor presents a high resolution (0.007/spl deg/), a great sensitivity and baseline stability.