A 53.36pF/MPA CMOS-MEMS Pressure Sensor with Compact Size and Integrated Digital Readout

This paper reports a miniaturized high-sensitivity CMOS-MEMS pressure sensor. Square-shaped unit capacitors are proposed to enhance the density of the sensing area. High sensitivity is achieved by combining the interdigitated and the parallel architectures. Experimental results show that the sensitivity of 53.36pF/MPa is realized in the range of 0 - 40 kPa, and the die area of the proposed transducer is smaller by 29% compared to the conventional round-shaped transducers with the same sensitivity. The proposed transducer and digital readout circuits are fabricated on the same chip in UMC
$0.18\ \mu \mathrm{m}$
CMOS MEMS process.