Resonant PZT MEMS Mirror with Segmented Electrodes

We report a transduction optimization method of piezo-based MEMS structures using segmentation of the excitation electrodes. Optimal transduction is achieved by matching the electric field distribution to the polarization distribution including the direct piezoelectric action caused by mechanical motion of the desired mode. Next, topological optimization of electrodes using custom Matlab scripts is applied to segment the electrodes. Method was applied to improve the design of the existing state-of-the art resonant piezoelectric MEMS mirrors. The optimized mirrors were fabricated and feature an 80% increase in the optical scan angle (θ
_opt
), lower dynamic deformation as well as 26% reduction in power consumption compared to original design.