Energy-Delay Sensitivity Analysis of a Nanoelectromechanical Relay With the Negative Capacitance of a Ferroelectric Capacitor

The energy-delay sensitivity of a nanoelectromechanical (NEM) relay and an NEM relay with the negative capacitance of a ferroelectric capacitor (NC + NEM relay) are theoretically investigated. The energy-delay characteristics of the NC + NEM relay deteriorate compared to those of the NEM relay when its movable beam becomes shorter/thicker than the critical beam length/thickness. The energy-delay characteristics of the NC + NEM relay (vs. the NEM relay) can be improved by increasing/decreasing the movable beam length/thickness. However, the maximum length and minimum thickness of the movable electrode are specified. This is necessary to avoid stuck-on failure. This study provides guidelines for improving the switching energy-delay characteristics and the operating voltage of the NC + NEM relay (vs. the NEM relay) by optimizing the device design variables.