Visualization Analysis of Microscopic Surface Topography on Ultra-Precision Optical Components

In this paper, the high-frequency, microscopic surface topography of precision optical components is analyzed. The surface profile of a precision optical component is measured by using a high-precision contacting profilometer. Visualization analysis software of mixed-language programming based on Matlab and LabVIEW is designed. Multiresolution decomposition for the sampled signals using the wavelet packet is performed and the high-frequency microscopic surface topography of the measured components is analyzed according to the detailed coefficients after decomposing. On the basis of the analysis results, the microscopic surface topography of the ultraprecise optical component can be determined whether it meets the requirements of optical applications, which provides reliable reference data for the fabrication of ultra-precision optical surfaces and a basis for further finishing of optical surfaces.