Liner-supported cylinder (LSC) technology to realize Ru/Ta/sub 2/O/sub 5//Ru capacitor for future DRAMs

The concept of liner-supported cylinder (LSC) technology to realize robust formation of cylindrical electrodes with Ru, which has advantages to bring out the best of Ta/sub 2/O/sub 5/ performance, is described. With experimental results including DRAM functionality, we show that LSC-Ta/sub 2/O/sub 5/ capacitor is a promising candidate to realize 0.10 /spl mu/m DRAMs and beyond.