Investigation of Mechanical Strength of Membrane Structure Consisting of Al/SiO2/Al

Three-layer membrane structures consisting of Al/SiO2/Al were fabricated using silicon group technology. The design of a research stand for determining the mechanical properties of membranes has been modernized. The values of mechanical strength and biaxial elastic modulus of the structures were obtained experimentally and calculated theoretically. Results of the developed model in the COMSOL Multiphysics proves a good correlation between the experimental critical pressure and the theoretical mechanical strength of the membrane. The distribution of mechanical stresses across the membrane using modelling and analytical calculation is shown. It is proved that the region of structure discontinuity is located at the membrane/substrate interface. The results obtained analytically, by modelling in the COMSOL Multiphysics and experimentally, were critically analyzed.