Method of Modeling of XeCl Excilamps with Barrier Discharge on the Basis HCl Halogen Donors

A technique has been developed for modeling XeCl-excilamps of a barrier discharge (halogen donor HCl) which takes into account the parameters of the emitter and the excitation system. Simulation of a XeCl barrier discharge excilamp based on HCl: Xe: Ne mixtures with a total pressure of 0,5-1 atm, excited by an LC circuit, was performed. The dependence of the radiation pulse energy and efficiency on the composition of the mixture, the parameters of the emitter and the excitation system is determined. An efficiency reach ~ 37%.