Fem Modeling Rayleigh Wave Sensors Based on GO/SiO2/128° YX-LiNbO3 Structures

3D-finite element method (3D-FEM) is used to investigate the characteristics of Rayleigh wave devices based on GO(Graphene Oxide)/SiO
₂
/IDT(inter-digital transducer)/128° YX-LiNbO
₃
structures, including the phase velocity v
_p
, electromechanical coupling coefficient k
²
, and gas sensing properties. The results show that the GO layersimprove the characteristics of the Rayleigh wave devices, that is, v
_p
andk
²
are increased by the introduction of GO films. And thek
²
of 9.32% associated with phase velocity of 4517m/s have obtained as h
_s
/λ=0.01 and h
_GO
=0.5μm, which are higher than that of GO free Rayleigh wave device. Meanwhile, the gas sensing sensitivity of theRayleigh wave sensor is also enhanced by GO layers. Therefore, GO is an ideal material for constructing SAW sensors for widespread applications.