Numerical Study of the Discharge Spatial Characteristics Influence on the KrF Laser Generation

A self-consistent two-dimensional model of the discharge KrF laser on Ne/Kr/F
₂
gas mixtures is described. The model predictions are compared with the experimental results for a KrF laser with an excitation pulse duration of
_~
30 ns. An agreement within 10% for the discharge current and laser energy is obtained. Evolution of the discharge width and of the radiation intensity distribution between the electrodes over the time of a radiation pulse is demonstrated. In addition, the effect of the electrode radii on laser energy is analyzed.