On the design of silicon Mach-Zehnder interferometers for the C-band

A silicon Mach-Zehnder interferometer is designed, fabricated and experimentally demonstrated for the C-band. Several interferometers were designed with different free spectral ranges. The influence of the waveguide width was carefully analyzed with respect to the performance of the interferometer and a study about the deviation of the design parameters of the waveguide was made.