Processing of Silicon Heterojunction Solar Cell and Its Secondary Ion Mass Spectrometric Characterization

Hetero junction with intrinsic layer (HIT™ is a trademark of Panasonic Ltd.) solar cell technology is a recent technology and has been successfully demonstrated for solar power generation by M/s Panasonic Ltd. In Heterojunction solar cell the junction is formed between amorphous silicon and crystalline silicon wafer. The major advantage of Heterojunction solar cell is that it offers higher Voc because of band bending. The reported highest efficiency of Heterojunction solar cell is 26.6 % by M/s Kaneka Corporation (heterojunction back-contact crystalline silicon solar cell). This paper discuss the processing of HIT cell and their Secondary Ion Mass Spectrometric (SIMS) characterization. The IV curve shows very high series resistance which are explained with the help of SIMS data.