Low-Power Small-Area Inverter-Based DSM for MEMS Microphone

A delta-sigma modulator (DSM) is proposed for the direct connection to micro-electro-mechanical systems (MEMS) microphone. To reduce power, both the DAC reference voltage (VREF) and the DSM supply voltage (VDD) are reduced to 700 mV by limiting the maximum linear acoustic input range to 110 dB SPL (sound pressure level). For the low VDD operation, the switched capacitor (SC) integrators of DSM employ CMOS inverters as amplifiers. A unity-gain buffer compensates the pole error of the SC integrator; it reduces chip area by replacing the auto-zero capacitor of conventional inverter-based SC integrator. Compared to the conventional integrator, the integrator of this brief reduces the pole error from 0.3% to 0.06%, reduces the chip area and the power by 32.4% and 24.8%, respectively. The 3
^rd
order DSM in a 65 nm CMOS process was measured to have Walden-figure of merit (FoMw) 89.3fJ/step, dynamic range (DR) 90.1 dB, signal-to-noise ratio (SNR) 87.2 dB, signal-to-noise and distortion ratio (SNDR) 86.4 dB, and power 122 uW at 10 MHz clock frequency (Fs).