A Two-dimensional MEMS Scanning Mirror Control Method based on Direct Digital Synthesizer

The two-dimensional MEMS scanning mirror is the core component in laser radar. It can obtain high quality imaging, based on its advantages of high resolution, fast imaging speed, small size and low price. A two-dimensional MEMS scanning mirror control method based on direct digital synthesizer is presented in this paper. This circuit achieves the phase accumulator of double direct digital synthesizer with FPGA, and directly realizes all kinds of frequency modulation of arbitrary waveform directly by digital method. In order to improve the drive performance of the two-dimensional MEMS scanning mirror, a 5th-order elliptic function filter is used to filter the sinusoidal driving signal of direct digital synthesizer. Testing results indicate that the proposed method of arbitrary waveform generator based on direct digital synthesizer can drive the two-dimensional MEMS scanning mirror with the characteristics of high scanning control precision and wide scanning range.