Structure Design and Simulation of Anti-high Overload Silicon Microcup Vibration Gyroscope

Micromachined gyroscope is the core component of modern guided weapons, but the launching process of guided weapons is accompanied by huge acceleration overload. Aiming at the problem that the moving mass of micromechanical gyroscope is greatly affected by overload under the condition of large overload, a MEMS cup-type vibrating gyroscope structure with anti-high overload is designed. Combined with the principle of four-abdominal motion, the working principle, vibration characteristics and anti-high overload characteristics of cup-type gyroscope structure are analyzed. The finite element model of Silicon microcup gyroscope is established in ANSYS finite element analysis software. Modal analysis and harmonic response analysis are performed respectively. The simulation analysis results show that the natural frequency difference of the Silicon microcup gyroscope between driving modal and sensitive modal is 0.8kHz, the frequency matching of working modal is good. The impact response of this structure under the action of a half-cycle sinusoidal acceleration impact load is analyzed according to the principle of impact dynamics, the maximum stress and maximum displacement of the resonant structure under the transient impact of 100000g are 11.38MPa and 8.06nm respectively. It is proved that the structure has excellent impact resistance.