Fabrication and Measurements of Inductive Devices for Scanning Microwave Microscopy

This article presents our results in fabrication and measurement of inductive devices for scanning microwave microscopy (SMM). Devices with resistance and inductance varying between 9 Ω-220 Ω and up to 200 pH were produced on SiN membrane using using clean room processes. Then, by combining actual SMM measurements performed for these devices and their simulation, we were able to test a calibration method which employs three known standards.