Investigation on Nickel-based Nano-scaffold Getter with Induction Heating and Rapid Activation

Getter is an important component of MEMS vacuum packaging, which can improve the performance, life and stability of the MEMS device. The existing 2D planar film getter has a low suction capacity and requires long-time activation, which restricts the high-quality batch production of MEMS devices. In this paper, the technology of nickel-based nano-scaffold getter combined with micro-area induction heating activation is adopted to meet the characteristic requirements of MEMS vacuum device packaging for large start-up inspiration rate, high inspiration capacity and quick activation of getter. Focusing on the structure and morphology, deposition of getter materials, getter performance test of nickel-based nano-scaffold based high-efficiency getter that can be induced and activated was preliminarily obtained.