MEMS Resonant Microphone Array for Lung Sound Classification

This paper presents piezoelectric MEMS microphone arrays for automatic detection of wheezing in lung sound. Very high unamplified sensitivities of 36.3 – 78.2 mV/Pa have been obtained at the resonant frequencies of the microphone array between 200 and 500 Hz where wheezing is typically prominent. Consequently, the acoustic feature of wheezing was distinguished better in both time domain and frequency domain in comparison with a flat-band reference microphone. With this advantage, as high as 97.44% identification accuracy of lung sounds with and without wheezing was achieved, while the same algorithm based on a commercial reference microphone yielded 89.74% accuracy.