Flying characteristics of advanced step sliders-optimization of sub-ambient step slider for decreasing sensitivity to altitude and velocity

We developed an advanced sub-ambient pressure step slider which consists of a step bearing with sub-micron depth and a cavity for generating sub-ambient pressure force to reduce variations of flying height caused by changing altitudes and disk velocities. We found that sensitivities of flying heights to altitudes and disk velocities strongly depend on the cavity depth and the step depth, respectively. The flying height change caused by altitude and disk velocity can be reduced by designing the cavity depth at which generated sub-ambient pressure forces shows maximal value and by designing the step depth of 0.2 /spl mu/m or less when the disk velocity is less than 35 m/s, respectively.