Quick Switching Overhead Micro-Heater Switch Structure Based GeTe Phase Change

In this paper, a novel quick switch RF phase change switch structure is presented. An indirect heated micro-heater is patterned on the top of phase change material, separated by dielectric barrier. The fabrication process is simplified due to the absence of micro-heater embedding and the phase transition is accelerated due to the optimization of heat transfer structure. The simulation results show that the time of heating and quenching process is 18.86ns and 49.25ns respectively, the time is shortened by 8.49ns and 9.48ns respectively compared with the existing structure, and the insertion loss <; 0.75dB and the isolation >12dB across a frequency range from 1GHz to 40GHz.