Design of a Wind Speed Sensor Based on MEMS

This paper presents the design, fabrication and test results of a 2D hot-air speed sensor based on the micro-electro-mechanical technology. The sensor uses constant power operation mode and uses the method of thermal temperature difference to measure the wind speed and direction. The sensor uses the micro-electro-mechanical peeling technology to fabricate both heating resistance and temperature-measuring resistance on glass substrates. Thermal isolation and high sensitivity are achieved by depending on the processing technology.