Multi-Inputs and Multi-Outputs Mems Resonator for Complex Logic Operations

Microelectromechanical systems MEMS resonatorbased computing devices have recently attracted significant attention due to their simplicity and potential toward energy efficient computing machines. Lately, there have been successful demonstrations of fundamental logic gates. However, the realization of complex multifunctional logic gates that require multi-input and multi-output lines have faced some obstacles, such as the interconnections between multiple resonators and the increase in device complexity due to the large required arrays of resonators. This paper demonstrates a 1:2 demux combinational logic gate from the first and the second vibrational modes of a single MEMS microstructure. The MEMS device consists of three connected inplane microbeams forming a U-shape. The microbeams can be electrostatically actuated individually or collectively.