Analysis and Simulation of the Influence of “V” Beam on the Impact Resistance of Micro Quartz Tuning Gyroscopes

For the effect of the anchor point and the vibration structure connecting beam-"V" beam in the micro quartz tuning fork gyroscope, based on the normalized shock response spectrum in the International Organization for Standardization, the finite element analysis simulation software was used to analyze the stress of different "V" beam thickness parameters when subjected to 1500g and 2 ms half sine impact in six directions. The simulation results show that when the thickness is 80 μm, the max stress is 94.721 MPa, and when the thickness is 75 μm, the max stress is 100.512 MPa. Due to the breaking strength of the quartz material (95 MPa), the minimum thickness of "V" beam is about 80 μm. And the gyroscope with "V" beam thickness of 80 μm is verified by impact test.